MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02198nam a22003617a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
102698 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KnowledgeUnlatched |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20210303105048.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS |
|---|
| fixed length control field |
m o d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
|---|
| fixed length control field |
cr u|||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
210129p20092019flu o u00| u eng d |
| 037 ## - SOURCE OF ACQUISITION |
|---|
| Institution to which field applies |
BiblioBoard |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420059113 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) |
|---|
| OCLC library identifier |
https://library.biblioboard.com/ext/api/media/d3662c37-f405-4c54-ac91-34b3f72a2396/assets/thumbnail.jpg |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
ScCtBLL |
| Transcribing agency |
ScCtBLL |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Park, Jea-Gun |
| Relator term |
author. |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| Remainder of title |
Fabrication of Next-Generation Nanodevices / |
| Statement of responsibility, etc. |
Jea-Gun Park, Ungyu Paik. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Name of producer, publisher, distributor, manufacturer |
CRC Press, |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
1 online resource (222 p.) |
| 506 0# - RESTRICTIONS ON ACCESS NOTE |
|---|
| Terms governing access |
Access copy available to the general public. |
| Standardized terminology for access restriction |
Unrestricted |
| Source of term |
star |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance. |
| 588 0# - SOURCE OF DESCRIPTION NOTE |
|---|
| Source of description note |
Description based on print version record. |
| 590 ## - LOCAL NOTE (RLIN) |
|---|
| Local note |
KU Select 2018: STEM Backlist Books |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Technology & Engineering / Nanotechnology & Mems |
| Source of heading or term |
bisacsh |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Technology |
| 655 #0 - INDEX TERM--GENRE/FORM |
|---|
| Genre/form data or focus term |
Electronic books. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Paik, Ungyu |
| Relator term |
author. |
| 758 ## - |
|---|
| -- |
Is found in: |
| -- |
Knowledge Unlatched |
| -- |
https://openresearchlibrary.org/module/2774bc74-146a-484f-a7ba-ab1d6a09bbfb |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://openresearchlibrary.org/content/d3662c37-f405-4c54-ac91-34b3f72a2396">https://openresearchlibrary.org/content/d3662c37-f405-4c54-ac91-34b3f72a2396</a> |
| Public note |
View this content on Open Research Library. |
| -- |
0 |
